Spectacular advances in the field of micro-nano-technologies have paved the way for the integration of extremely diverse functionalities in a volume of the order of mm3. Autonomous microsystems, based on this integration and at the heart of the emergence of sensor networks and the Internet of Things, do not require an external energy supply, are able to communicate wirelessly and integrate sensors/actuators as well as data processing circuits. Their applications are numerous: distributed sensor/actuator systems in automotive, civil engineering, health, production lines, etc.
The objective of this course is to study the principles of design and manufacturing of autonomous microsystems. To optimize the performance of these systems, it is imperative to be able to manipulate and link diverse concepts such as micro-nano-electronics technologies, sensors / actuators for energy harvesting and power management for autonomy, design of low-power, low-voltage circuitry.
Introduction to the principles of microelectronic technologies Description of specific integrated sensor/actuator technologies, applications Ambient energy harvesting Electronic signal conditioning Constraints linked to nanoscale integration (thermal, mechanical, noise, etc.)
Practical work: Introduction to micro-nanotechnologies in a clean room Practical work: Design of a low-noise, low-power, low-voltage CMOS amplification block Study class: study of an autonomous microsystem